Microscopic Investigation of Microelectronics

For my class Introduction to Microelectronics and Nanotechnology in the fall of 2010, I was part of a three-person team that explored computer processor structures by observing them under the SEM and light microscopes.  
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Pentium I transistors imaged on the SEM and light microscope

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We were able to see how the feature size got smaller in successive generations of the pentium processor.

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Our measurements fit nicely on a known Moore’s Law curve.

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Cutting with a diamond saw

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Polished wafer ready for SEM imaging

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